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Proceedings Paper

Applicability of iTIRM for roughness reduction monitoring
Author(s): Robert-Jaap van der Bijl; Hedser H. van Brug; Oliver W. Faehnle; Joseph J. M. Braat
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Paper Abstract

The results obtained with iTIRM during polishing are presented. It is shown that iTIRM unites the working ranges of several other techniques where iTIRM can be used during production where the others cannot. The applicable range of iTIRM is shown to be at least 1 micrometers down to 0.1 nm rms.

Paper Details

Date Published: 27 December 2001
PDF: 5 pages
Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); doi: 10.1117/12.453632
Show Author Affiliations
Robert-Jaap van der Bijl, Delft Ctr. for Optical Surfaces/TNO TPD (Netherlands)
Hedser H. van Brug, Delft Ctr. for Optical Surfaces/TNO TPD (Netherlands)
Oliver W. Faehnle, Fisba Optik (Switzerland)
Joseph J. M. Braat, Delft Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 4451:
Optical Manufacturing and Testing IV
H. Philip Stahl, Editor(s)

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