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Proceedings Paper

Back-illuminated large-format Loral CCDs
Author(s): Michael P. Lesser
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Paper Abstract

The authors use charge-coupled devices (CCDs) from a lot of Loral wafers containing 3072 X 1024 and 800 X 1200 pixel detectors. These CCDs were specifically designed for astronomical spectrographic applications with the intention of thinning them at Steward Observatory for backside illumination. The thinning procedure and how it relates to the packaging method developed to keep the devices flat for use in fast optical beams are described. Initial results with a new oxidation procedure to allow better backside charging is also described. This oxidation method is especially effective with biased gate-charging techniques which apply a voltage directly over the backside oxide.

Paper Details

Date Published: 1 July 1991
PDF: 6 pages
Proc. SPIE 1447, Charge-Coupled Devices and Solid State Optical Sensors II, (1 July 1991); doi: 10.1117/12.45323
Show Author Affiliations
Michael P. Lesser, Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 1447:
Charge-Coupled Devices and Solid State Optical Sensors II
Morley M. Blouke, Editor(s)

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