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Proceedings Paper

Scattering from high-sloped surfaces using the Kirchhoff approximation
Author(s): Neil Charles Bruce
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Paper Abstract

The Kirchhoff approximation has been used for many years to calculate for the problem of scattering of light from rough surfaces. One of the limitations of the method is on the surface slopes for which the method can be used. For large surface slopes there is more shadowing and multiple scattering and the sampling of the surface, which is in constant intervals of the variable along the mean plane of the surface, becomes a problem. In this work, the Kirchhoff approximation is reformulated to permit the use of this method in surfaces with very high slopes. Results are presented for surfaces containing rectangular shaped grooves, surfaces which have infinite slope on the sidewalls of the grooves.

Paper Details

Date Published: 22 October 2002
PDF: 6 pages
Proc. SPIE 4780, Surface Scattering and Diffraction for Advanced Metrology II, (22 October 2002); doi: 10.1117/12.451845
Show Author Affiliations
Neil Charles Bruce, Univ. Nacional Autonoma de Mexico (Mexico)

Published in SPIE Proceedings Vol. 4780:
Surface Scattering and Diffraction for Advanced Metrology II
Zu-Han Gu; Alexei A. Maradudin, Editor(s)

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