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Proceedings Paper

Review of multilayer normal-incidence gratings operating at 9- to 40-nm wavelengths
Author(s): John F. Seely
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Paper Abstract

It is now possible to reliably implement multilayer-coated diffraction gratings in spaceflight and laboratory spectrometers that operate at normal incidence and with high efficiency in the 9 nm to 40 nm wavelength range. The design and fabrication of the grating groove profile and the matching multilayer coating are based on computational modeling using the computer program PCGRATE. The multilayer gratings are characterized using atomic force microscopy and by measuring the diffraction efficiency using synchrotron radiation. Recent research has focused on multilayer coatings other than Mo/Si such as Sc/Si for 40 nm, MoRu/Be for 11 nm, and Mo/Y for 9 nm.

Paper Details

Date Published: 24 December 2002
PDF: 6 pages
Proc. SPIE 4782, X-Ray Mirrors, Crystals, and Multilayers II, (24 December 2002); doi: 10.1117/12.451353
Show Author Affiliations
John F. Seely, Naval Research Lab. (United States)

Published in SPIE Proceedings Vol. 4782:
X-Ray Mirrors, Crystals, and Multilayers II
Andreas K. Freund; Albert T. Macrander; Tetsuya Ishikawa; James L. Wood, Editor(s)

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