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Proceedings Paper

Status of small d-spacing x-ray multilayer development at Osmic
Author(s): Yuriy Ya. Platonov; Luis Gomez; David Broadway
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Paper Abstract

The deposition and X-ray performance of multilayer structures with d-spacings ranging from 1.2nm to 3.5nm has been presented. Different pairs of materials such as W (Mo, Ni, Cr, and La)/B4C, Ni (Cr, Co, V)/C have been considered. X-ray reflectivity of the multilayers has been measured in the photon energy range from ~0.18keV to ~100keV. W/B4C structures with d~1.5nm showed reflectivity greater than 30% at Cu-Kα (E~8keV). Performance of a W/B4C structure with d~1.5nm has been compared with TIAP crystal performance in analysis of Si-Kα (1.74keV), Al-Kα (1.5keV), Mg-Kα (1.25keV) and Na-Kα (1.04keV) radiation. Results showed that small d-spacing multilayers can be considered for TIAP crystal replacement in Wavelength Dispersive X-Ray Fluorescence (WDXRF) spectrometers. The absolute reflectivity of near normal incidence structures at O-Kα (~293eV), C-Kα (~277eV) and B-Kα (~183eV) radiation lines has been measured to be ~1.5%, 14% and 43% respectively with spectral resolution of up to ~0.6%.

Paper Details

Date Published: 24 December 2002
PDF: 8 pages
Proc. SPIE 4782, X-Ray Mirrors, Crystals, and Multilayers II, (24 December 2002); doi: 10.1117/12.451345
Show Author Affiliations
Yuriy Ya. Platonov, Osmic, Inc. (United States)
Luis Gomez, Osmic, Inc. (United States)
David Broadway, Osmic, Inc. (United States)

Published in SPIE Proceedings Vol. 4782:
X-Ray Mirrors, Crystals, and Multilayers II
Andreas K. Freund; Albert T. Macrander; Tetsuya Ishikawa; James L. Wood, Editor(s)

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