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Proceedings Paper

Reconstructing the pupil function of microscope objectives from the intensity PSF
Author(s): Joachim Wesner; Joachim Heil; Thomas Sure
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Paper Abstract

The quality of high performance microscope objectives is usually verified by interferometric measurement of the wave front. However, a non-interferometric method might be preferable, when appropriate light sources of sufficient coherence length or an interferometric setup are difficult to realize. Under these circumstances, the complex pupil function of an optical system can also be determined from its intensity point spread function (PSF), i.e. from the image of a sub-resolution point object. We present a system that can determine the pupil function of high-NA microscope objectives from defocused images of an artificial point source. An extended version of the "Misell" algorithm is used, which utilizes 4 or more PSF images to overcome the Fourier phase ambiguity and which generally converges rapidly to the correct pupil function both in phase and amplitude. The algorithm can also compensate small errors in the x-, y- and z-positions of the images, which might be caused by vibrations, thermal drift or the limited accuracy of the z-drive.

Paper Details

Date Published: 16 October 2002
PDF: 12 pages
Proc. SPIE 4767, Current Developments in Lens Design and Optical Engineering III, (16 October 2002); doi: 10.1117/12.451320
Show Author Affiliations
Joachim Wesner, Leica Microsystems Wetzlar GmbH (Germany)
Joachim Heil, Microsystems Wetzlar GmbH (Germany)
Thomas Sure, Microsystems Wetzlar GmbH (Germany)

Published in SPIE Proceedings Vol. 4767:
Current Developments in Lens Design and Optical Engineering III
Robert E. Fischer; Warren J. Smith; R. Barry Johnson, Editor(s)

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