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Proceedings Paper

Progress of ICC Alpha-Cell microbolometer development program
Author(s): Kevin Charles Liddiard; Jonathan P. Knauth; Ryan Decker; Bruce Altermus; Bai Xu; Nigel Robinson
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Paper Abstract

In a previous paper to the present forum we outlined the Infrared Components Corporation (ICC) microbolometer development program based on technology licensed from the Australian Defence Science and Technology Organisation (DSTO). We presented an overview of the processing technology and discussed the technology transfer package being developed for implementation in a silicon MEMS foundry. In this paper the progress of the program will be reported, including work at DSTO and Electro-optic Sensor Design (EOSD), and technology transfer to the 200mm MEMS foundry at the SUNY Albany Institute of Materials (UAIM). The development of a new readout integrated circuit (ROIC) and associated camera initiatives at ICC will be discussed.

Paper Details

Date Published: 23 January 2003
PDF: 11 pages
Proc. SPIE 4820, Infrared Technology and Applications XXVIII, (23 January 2003); doi: 10.1117/12.451217
Show Author Affiliations
Kevin Charles Liddiard, Electro-optic Sensor Design (Australia)
Jonathan P. Knauth, Infrared Components Corp. (United States)
Ryan Decker, Infrared Components Corp. (United States)
Bruce Altermus, Infrared Components Corp. (United States)
Bai Xu, Univ. at Albany (United States)
Nigel Robinson, Defence Science and Technology Organisation (Australia)

Published in SPIE Proceedings Vol. 4820:
Infrared Technology and Applications XXVIII
Bjorn F. Andresen; Gabor F. Fulop; Marija Strojnik, Editor(s)

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