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Proceedings Paper

Submicron focusing of hard x rays with reflecting surfaces at the ESRF
Author(s): Olivier Hignette; Gerard Rostaing; Peter Cloetens; Amparo Rommeveaux; Wolfgang Ludwig; Andreas K. Freund
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Paper Abstract

We describe Kirkpatrick-Baez (KB) reflecting mirror systems that have been developed at the European Synchrotron Radiation Facility (ESRF). They are intended to be used mainly in the hard x-ray domain from 10 KeV to 30 KeV for microfluorescence, microdiffraction and projection microscopy applications. At 19 KeV a full width at half maximum (FWHM) spot size of 200x600 nanometers has been measured and with an estimated irradiance gain of 3.5x105. The alignment and bending processes of the system are automated based on the wavefront information obtained by sequentially scanning slits and reading a position-sensitive device located in the focal plane. The sub-microradian sensitivity of this method allows us to predict the spot size and ot provide a metrology map of the surfaces for future improvements of the performances. A novel device based on specular reflection by a micromachined platinum mirror has been used to determine the spot size with an equivalent slit size of less than 100 nanometers. Projection phase images of submicron structures are presented which clearly show both the high potential and also the present limitations of the system. First microfluorescence images obtained at 20.6 KeV are shown. Finally, a roadmap towards diffraction-limited performance with metal and multilayer surfaces is presented.

Paper Details

Date Published: 13 December 2001
PDF: 12 pages
Proc. SPIE 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II, (13 December 2001); doi: 10.1117/12.450227
Show Author Affiliations
Olivier Hignette, European Synchrotron Radiation Facility (France)
Gerard Rostaing, European Synchrotron Radiation Facility (France)
Peter Cloetens, European Synchrotron Radiation Facility (France)
Amparo Rommeveaux, European Synchrotron Radiation Facility (France)
Wolfgang Ludwig, European Synchrotron Radiation Facility (France)
Andreas K. Freund, European Synchrotron Radiation Facility (France)

Published in SPIE Proceedings Vol. 4499:
X-Ray Micro- and Nano-Focusing: Applications and Techniques II
Ian McNulty, Editor(s)

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