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Proceedings Paper

Diffraction-limited microbeam with Fresnel zone plate optics in hard x-ray regions
Author(s): Yoshio Suzuki; Akihisa Takeuchi; Hidekazu Takano; Takuji Ohigashi; Hisataka Takenaka
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Paper Abstract

X-ray microbeam using Fresnel zone plate as a beam focusing device has been tested at an undulator beamline of Spring-8. The zone material is tantalum with thickness of 1 micrometers , and the zone structure is fabricated by using electron beam lithography technique. The outermost zone width of the zone plate is 0.25micrometers . By utilizing a fully coherent illumination, a focused spot size near to the diffraction- limit (0.3micrometers ) has been achieved at an X-ray energy of 8 keV. The measured beam profiles shows good agreement with the theoretical profile. The measured diffraction efficiency agrees well with theoretical value within an X- ray energy region from 6 keV to 10 keV. A scanning microscopy experiment has also been performed in order to evaluate the spatial resolution. Fine structures of up to 0.2micrometers are clearly observed in the measured image. The modulation transfer function derived from the measured image is 10% at 0.2micrometers line and 0.2micrometers space.

Paper Details

Date Published: 13 December 2001
PDF: 11 pages
Proc. SPIE 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II, (13 December 2001); doi: 10.1117/12.450224
Show Author Affiliations
Yoshio Suzuki, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)
Akihisa Takeuchi, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)
Hidekazu Takano, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)
Takuji Ohigashi, Univ. of Tsukuba (Japan)
Hisataka Takenaka, NTT Advanced Technology Corp. (Japan)

Published in SPIE Proceedings Vol. 4499:
X-Ray Micro- and Nano-Focusing: Applications and Techniques II
Ian McNulty, Editor(s)

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