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Proceedings Paper

Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project
Author(s): Hendrik Rothe; Guenther Wilkening; Dorothee Hueser
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Paper Abstract

Scanning Probe Microscopy is a powerful tool in nanometrology. SPMs are now widely used in research institutions, and even in some branches of high-tech industry. However, there is a severe drawback: these instruments provide mainly images, not measurements of micro- and nano-objects. Therefore the European Commission decided to establish a network to investigate the possibility of calibration procedures traceable to the national standards of the partners involved. This paper deals with the objectives of the network, the partners, some round robin tests, the calibration structures used and the conclusions drawn from the work of the SPMet group. Consequently, it is a summary of the deliverables for the European Commission authored by the members of the network.

Paper Details

Date Published: 10 December 2001
PDF: 13 pages
Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); doi: 10.1117/12.450097
Show Author Affiliations
Hendrik Rothe, Univ. der Bundeswehr Hamburg (Germany)
Guenther Wilkening, Physikalisch-Technische Bundesanstalt (Germany)
Dorothee Hueser, Univ. der Bundeswehr Hamburg (Germany)

Published in SPIE Proceedings Vol. 4449:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
Angela Duparre; Bhanwar Singh, Editor(s)

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