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Proceedings Paper

Anodic alumina as a material for MEMS
Author(s): Kirill I. Delendik; Olga L. Voitik
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Paper Abstract

A new promising material for MEMS elements - anodic aluminium oxide is described. There were developed few methods of anodic aluminium oxide MEMS elements production on the base of microelectronic technology. Described methods of 3D MEMS elements obtaining can essentially supplement and in some cases substitute existing LIGA-like technologies owing to their cheapness and simplicity. It is necessary to point out that the realization of MEMS elements by described methods requires no complex and expensive equipment.

Paper Details

Date Published: 21 November 2001
PDF: 7 pages
Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448987
Show Author Affiliations
Kirill I. Delendik, Institute of Electronics (Belarus)
Olga L. Voitik, Institute of Electronics (Belarus)

Published in SPIE Proceedings Vol. 4592:
Device and Process Technologies for MEMS and Microelectronics II
Jung-Chih Chiao; Lorenzo Faraone; H. Barry Harrison; Andrei M. Shkel, Editor(s)

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