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Proceedings Paper

Shape analysis of cylindrical micromirrors for angular focusing
Author(s): Max Ti-Kuang Hou; Pei-Yuan Hong; Rongshun Chen
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Paper Abstract

In this paper, we analyze the shape of the cylindrical micromirror, which directly defines the profile of the reflecting surface, and is very important for the function on focusing. A cylindrical micromirror can converge incident rays to a real focal line after reflection, namely angular focusing. Therefore, under specific design two cylindrical micromirrors, the primary and secondary, can converge incident rays into a real focal point after twice reflection. The curved shape of micromirror, formed due to the stress-induced bending of the bilayer microstructure upon release, has been theoretically analyzed and numerically simulated. The results show that the reflecting surface, especially at boundaries, is not perfectly cylindrical, while adding longitudinal frames can make some improvement.

Paper Details

Date Published: 19 November 2001
PDF: 9 pages
Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); doi: 10.1117/12.448843
Show Author Affiliations
Max Ti-Kuang Hou, National Tsing Hua Univ. (Taiwan)
Pei-Yuan Hong, National Tsing Hua Univ. (Taiwan)
Rongshun Chen, National Tsing Hua Univ. (Taiwan)

Published in SPIE Proceedings Vol. 4593:
Design, Characterization, and Packaging for MEMS and Microelectronics II
Paul D. Franzon; Ajay P. Malshe; Francis E.H. Tay, Editor(s)

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