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Proceedings Paper

Fast collisional capillary discharge source for soft x-ray production and applications
Author(s): Giuseppe Tomassetti; Libero Palladino; Antonio Ritucci; Lucia Reale; Tania Limongi; Sergei V. Kukhlevsky; Jozef Kaiser; Francesco Flora; Luca Mezi
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Paper Abstract

We report on a fast soft x-ray source consisting in a high temperature small diameter plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x-ray microscopy applications and also with the aim of developing a soft x-ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO2, as plasma medium, after the optimization of the discharge setup and electrical parameters.

Paper Details

Date Published: 14 November 2001
PDF: 8 pages
Proc. SPIE 4504, Applications of X Rays Generated from Lasers and Other Bright Sources II, (14 November 2001); doi: 10.1117/12.448460
Show Author Affiliations
Giuseppe Tomassetti, Univ. of L'Aquila (Italy)
Libero Palladino, Univ. of L'Aquila (Italy)
Antonio Ritucci, Univ. of L'Aquila (Italy)
Lucia Reale, Univ. of L'Aquila (Italy)
Tania Limongi, Univ. of L'Aquila (Italy)
Sergei V. Kukhlevsky, Univ. of L'Aquila and Univ. of Pecs (Hungary)
Jozef Kaiser, Univ. of L'Aquila and Brno Univ. of Technology (Czech Republic)
Francesco Flora, ENEA-Frascati (Italy)
Luca Mezi, ENEA-Frascati (Italy)

Published in SPIE Proceedings Vol. 4504:
Applications of X Rays Generated from Lasers and Other Bright Sources II
George A. Kyrala; Jean-Claude J. Gauthier, Editor(s)

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