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Proceedings Paper

Quality assurance of HARMS and MOEMS surface structures using confocal white light microscopy
Author(s): Hans-Joachim Jordan; Rainer Brodmann; Marcus Grigat; Juergen Valentin
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Paper Abstract

The commercial success in micro-system technologies depends on a reliable and controlled mass production. Without a good quality assurance and process control it is impossible to guarantee the specifications of the products and to minimize the production costs. Among test equipment for the function of the end product it is necessary to introduce dimensional metrology devices for checking vertical and lateral structures in silicon or PMMA materials close to production machines. Due to the small dimensions of HARMS or MOEMS components, traditional surface testers as mechanical stylus instruments are not able to analyze structures with high aspect ratio. In this paper a new approach to surface measurement technique, the confocal white light microscopy, is described which opens the possibility to measure soft or transparent materials from the nanometer up to the millimetre range. In contrast to other methods, like phase shift interferometry, the confocal measurement technique is nearly free of artefacts due to physical pinhole filter masks.

Paper Details

Date Published: 9 November 2001
PDF: 8 pages
Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001);
Show Author Affiliations
Hans-Joachim Jordan, NanoFocus Messtechnik GmbH (Germany)
Rainer Brodmann, NanoFocus Messtechnik GmbH (Germany)
Marcus Grigat, NanoFocus Messtechnik GmbH (Germany)
Juergen Valentin, NanoFocus Messtechnik GmbH (Germany)

Published in SPIE Proceedings Vol. 4440:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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