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Proceedings Paper

Microretarder array for imaging polarimetry in the visible wavelength region
Author(s): Tetsuya Hamamoto; Hiroshi Toyota; Hisao Kikuta
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Paper Abstract

We made a form birefringent micro-retarder array for the real-time imaging polarimetry. The polarimetry system is composed of an imaging lens, the retarder array, a polarization film, and an image sensor. We fabricated a 92x70 retarder array by the electron-beam lithography and the reactive ion etching. Each retarder was a TiO2 subwavelength grating of 0.15(mu) nm in a period on a silica substrate. Some polarization images of four Stokes parameters were obtained with the polarimetry system.

Paper Details

Date Published: 9 November 2001
PDF: 8 pages
Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); doi: 10.1117/12.448051
Show Author Affiliations
Tetsuya Hamamoto, Dai Nippon Screen Manufacturing Co., Ltd. (Japan)
Hiroshi Toyota, Osaka Science and Technology Ctr. (Japan)
Hisao Kikuta, Osaka Prefecture Univ. (Japan)

Published in SPIE Proceedings Vol. 4440:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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