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Proceedings Paper

Cutting of optical materials by using femtosecond laser pulses
Author(s): Stefan Nolte; Matthias Will; Markus Augustin; Peter Triebel; Karsten Zoellner; Andreas Tuennermann
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Paper Abstract

In the past years, ultrashort pulse lasers have been established as precise and universal tools for the microstructuring of solid materials. Since thermal and mechanical influences are minimized, the application of this technology is also suitable for the structuring of optical materials and opens new possibilities. In this paper, the influence of pulse duration, pulse energy (fluence) and polarization on the cutting quality for glass and silicon will be discussed. As a concrete application, the cutting and micromarking of dielectric coated mirrors for high power fiber lasers will be highlighted.

Paper Details

Date Published: 9 November 2001
PDF: 9 pages
Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); doi: 10.1117/12.448036
Show Author Affiliations
Stefan Nolte, Friedrich-Schiller-Univ. Jena (Germany)
Matthias Will, Friedrich-Schiller-Univ. Jena (Germany)
Markus Augustin, Friedrich-Schiller-Univ. Jena (Germany)
Peter Triebel, Friedrich-Schiller-Univ. Jena (Germany)
Karsten Zoellner, Friedrich-Schiller-Univ. Jena (Germany)
Andreas Tuennermann, Friedrich-Schiller-Univ. Jena (Germany)

Published in SPIE Proceedings Vol. 4440:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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