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Proceedings Paper

Fabrication of organic photonic crystals for optical wavelengths
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Paper Abstract

We present a novel method for making 2D photonic crystal structures. The method relies on different dissolution rates of various organic materials in the developer. Thus, placing a layer of high dissolution rate material under a layer of low dissolution rate material yields a membrane released from the substrate where the photonic crystal has been patterned. This allows for creation of the entire structure in a single chemical development step. We present structures fabricated with this method.

Paper Details

Date Published: 9 November 2001
PDF: 9 pages
Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); doi: 10.1117/12.448035
Show Author Affiliations
Janusz A. Murakowski, Univ. of Delaware (United States)
Dennis W. Prather, Univ. of Delaware (United States)

Published in SPIE Proceedings Vol. 4440:
Lithographic and Micromachining Techniques for Optical Component Fabrication
Ernst-Bernhard Kley; Hans Peter Herzig, Editor(s)

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