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Proceedings Paper

Low-temperature joining of Zerodur and SiO2 for optical device manufacture
Author(s): Samuel D. Conzone; Mark J. Davis
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Paper Abstract

A proprietary, inorganic, sol-gel joining technique was used to fabricate Zerodur-Zerodur-SiO2 joints at temperatures 5000 psi, regardless of the heat treatment temperature from 25 to 120 degrees C. The strength of Zerodur-SiO2 joints was 4500 psi. The Zerodur-Zerodur joints exhibited excellent dimensional stability perpendicular to the joint interface as there was no statistically significant difference between the coefficient of thermal expansion measured for joined and monolithic samples. The inorganic, sol-gel joining technique is an attractive technology that could be employed when fabricating light-weighted, dimensionally stable mirror blanks and microlithography stages.

Paper Details

Date Published: 2 November 2001
PDF: 8 pages
Proc. SPIE 4452, Inorganic Optical Materials III, (2 November 2001); doi: 10.1117/12.446885
Show Author Affiliations
Samuel D. Conzone, Schott Glass Technologies Inc. (United States)
Mark J. Davis, Schott Glass Technologies Inc. (United States)

Published in SPIE Proceedings Vol. 4452:
Inorganic Optical Materials III
Alexander J. Marker III; Mark J. Davis, Editor(s)

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