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Proceedings Paper

Phase-shifting interference microscope for the characterization of metallic interconnections of flat panel displays
Author(s): Pierre Boher; Jean-Philippe Piel; Jean-Louis P. Stehle; Arnaud Dubois; Albert Claude Boccara
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Paper Abstract

A phase-shifting interference microscope based on the integrating-bucket technique with sinusoidal phase modulation is used to characterize metallic interconnections of flat panel displays. The system uses four frames obtained by integration of the time-varying intensity in an interference pattern during the four quarters of the modulation period. Phase images are produced in real-time at a rate of several Hertz. On single material surfaces, the topology can be deduced directly. When different kinds of materials are present on the surface, like metallic interconnections on glass panel, we show that it is necessary to correct results from the phase change on reflection induced by the difference in refractive indices. Results are compared to scanning tip measurements. The microscope is mounted on a XYZ table to map the surface of the flat panel displays. The homogeneity of the height of metallic interconnections on the entire surface of the panel can be automatically determined. Additional information like metallic surface roughness is also available.

Paper Details

Date Published: 23 October 2001
PDF: 11 pages
Proc. SPIE 4447, Surface Scattering and Diffraction for Advanced Metrology, (23 October 2001); doi: 10.1117/12.446735
Show Author Affiliations
Pierre Boher, SOPRA SA (France)
Jean-Philippe Piel, SOPRA SA (France)
Jean-Louis P. Stehle, SOPRA SA (France)
Arnaud Dubois, Ecole Superieure de Physique et Chimie Industrielles (France)
Albert Claude Boccara, Ecole Superieure de Physique et Chimie Industrielles (France)

Published in SPIE Proceedings Vol. 4447:
Surface Scattering and Diffraction for Advanced Metrology
Zu-Han Gu; Alexei A. Maradudin, Editor(s)

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