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Proceedings Paper

Development of novel optical switches based on the MEMS electromagnetic micro-actuator
Author(s): Shuhai Jia; Xiaolin Zhao; Sheng Zhang; Bingchu Cai; Jianzhi Feng
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Paper Abstract

This paper reports on the design, fabrication and performance of some novel MEMS (Micro-electro-mechanical system) optical switches. We have developed a new kind of MEMS electromagnetic micro actuator, which can drive mirrors enter or leave the optical path of switch. The 1 X 2, 2 X 2, 1 X 4 and 1 X 8 single mode optic-fiber switches have been fabricated. The switching voltage is less than 8 V and the switching time is no more than 5 ms. Using optic-fiber collimator for light coupling, we obtain small insertion loss (> -0.8 dB), considering the length of the light path is 40 mm. The cross-talk is less than -60 dB, extinction ratio is -60 dB.

Paper Details

Date Published: 16 October 2001
PDF: 4 pages
Proc. SPIE 4602, Semiconductor Optoelectronic Device Manufacturing and Applications, (16 October 2001); doi: 10.1117/12.445755
Show Author Affiliations
Shuhai Jia, Shanghai Jiaotong Univ. (China)
Xiaolin Zhao, Shanghai Jiaotong Univ. (China)
Sheng Zhang, Shanghai Jiaotong Univ. (China)
Bingchu Cai, Shanghai Jiaotong Univ. (China)
Jianzhi Feng, Shanghai Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 4602:
Semiconductor Optoelectronic Device Manufacturing and Applications
David Chen; David Chen; Guo-Yu Wang; Ray T. Chen; Guo-Yu Wang; Chang-Chang Zhu, Editor(s)

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