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Proceedings Paper

Development and traceability of a multifunctional microscope
Author(s): Wen-Jong Chen; Chih-Kung Lee; Shui-Shong Lua; Yu-Jena Chang; Yu-Chiaa Chang; Chi-Yuana Chang; Shuen-Chen Shiue; Shu-Sheng Lee; Huay-Chung Liou
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Paper Abstract

A multi-functional microscope named Morphininscope, which was designed to switch between various measurement functions by simply rotating its turret or turning on some sub-systems, was presented. Some of the various built-in functions of this microscope, including a confocal microscope, a photon-tunneling microscope, a laser based phase-shifting interferometry microscope, a Linnik interference microscope, and an ellipsometer, etc. are examined. The opportunity to bring traceability to thin-film or nano-materials metrology, which is an issue under extensive investigations now, offered by the multi-functional microscope were also detailed. Design thinking, optical and opto-mechanical configurations adopted, and experimental results of this newly multi-functional microscope were examined. Measurement of a grating surface, the real and the imaginary complex refractive indices, and the corrected surface profile of an inhomogeneous specimen were used to demonstrate the performance and advantages of this type of multi-functional microscope. Potential to achieve and transfer traceability of the primary standard in Morphinscope was also discussed.

Paper Details

Date Published: 22 October 2001
PDF: 10 pages
Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445622
Show Author Affiliations
Wen-Jong Chen, National Taiwan Univ. (Taiwan)
Chih-Kung Lee, National Taiwan Univ. (Taiwan)
Shui-Shong Lua, National Taiwan Univ. (Taiwan)
Yu-Jena Chang, National Taiwan Univ. (Taiwan)
Yu-Chiaa Chang, National Taiwan Univ. (Taiwan)
Chi-Yuana Chang, National Taiwan Univ. (Taiwan)
Shuen-Chen Shiue, National Taiwan Univ. (Taiwan)
Shu-Sheng Lee, National Taiwan Univ. (Taiwan)
Huay-Chung Liou, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 4401:
Recent Developments in Traceable Dimensional Measurements
Jennifer E. Decker; Nicholas Brown, Editor(s)

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