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Proceedings Paper

Tracing back radius of curvature and topography to the base unit of length with ultraprecision
Author(s): Ingolf Weingaertner; Michael Schulz; Ralf D. Geckeler; Otto Jusko; Michael Neugebauer; Arnold Nicolaus; Gerhard Boensch
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Paper Abstract

Very recently, in the context of measuring aspheres and complex surfaces with ultra-precision, a particular measurement principle was developed which determines the form (topography) of extended test samples by scanning measurements of curvature, being the reciprocal of the radius of curvature. The curvature sensor must be traceably calibrated with a low uncertainty. This back tracing can be done, first, by measuring radius of full spheres with a highly accurate sphere interferometer, second, by measuring roundness with highly accurate methods, and third, by measuring specially designed calibration aspheres. These procedures for traceably calibrating the curvature sensor will be described.

Paper Details

Date Published: 22 October 2001
PDF: 9 pages
Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); doi: 10.1117/12.445618
Show Author Affiliations
Ingolf Weingaertner, Physikalisch-Technische Bundesanstalt (Germany)
Michael Schulz, Physikalisch-Technische Bundesanstalt (Germany)
Ralf D. Geckeler, Physikalisch-Technische Bundesanstalt (Germany)
Otto Jusko, Physikalisch-Technische Bundesanstalt (Germany)
Michael Neugebauer, Physikalisch-Technische Bundesanstalt (Germany)
Arnold Nicolaus, Physikalisch-Technische Bundesanstalt (Germany)
Gerhard Boensch, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 4401:
Recent Developments in Traceable Dimensional Measurements
Jennifer E. Decker; Nicholas Brown, Editor(s)

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