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Proceedings Paper

Novel design of a one-dimensional measurement probe
Author(s): Rudolf Thalmann; Dannis M. Brouwer; Han Haitjema; Piet H. J. Schellekens
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Paper Abstract

The mechanical probing system is often one of the limiting factors in the calibration of length standards. It has been shown, that for highly accurate applications a particular effect, which is often not considered, has to be taken into account: a spherical probe on a stylus undergoes a small rotation due to the angular stylus deflection, which creates friction and potentially stick slip during the probing process and may thus lead to non-reproducible probing. A novel probe has been built which avoids this effect by an additional degree of freedom, providing a small vertical movement of the stylus. The probe is of a monolithic flexure hinge design with a ridge connection of the stylus and the mirror reflector for the plane mirror interferometer, which measures the displacement. Them measurement force, which is proportional to the deflection of the hinges, is measured with a capacitive probe. The probing procedure generates the force/deflection curve and allows for the measurement force to be extrapolated to zero. The presented test results show the system's capability for a probing accuracy in the nanometer range.

Paper Details

Date Published: 22 October 2001
PDF: 7 pages
Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001);
Show Author Affiliations
Rudolf Thalmann, Swiss Federal Office of Metrology and Accreditation (Switzerland)
Dannis M. Brouwer, Technische Univ. Eindhoven (Netherlands)
Han Haitjema, Technische Univ. Eindhoven (Netherlands)
Piet H. J. Schellekens, Technische Univ. Eindhoven (Netherlands)

Published in SPIE Proceedings Vol. 4401:
Recent Developments in Traceable Dimensional Measurements
Jennifer E. Decker; Nicholas Brown, Editor(s)

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