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Proceedings Paper

Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization
Author(s): Sylvain Petitgrand; Reda Yahiaoui; Alain Bosseboeuf; Kamran Danaie
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Paper Abstract

Interferometric optical profilometers are increasingly used for the characterization of the static deformation of micromechanical devices and Micro(Opto)Electromechanical Systems (M(O)EMS). Recent works have shown that they can also be used for full field dynamic measurements provided that a stroboscopic light source is added or that time averaging of the interferograms is performed. In this work we investigate two methods to make quantitative time-averaged microscopic interferometric measurements. Both methods are based on the calibration of the fringe contrast variation as function of the vibration amplitude. It is demonstrated from experiments on micromechanical devices that 3D vibration modes shapes can be measured at any frequency with a spatial resolution in the micrometer range and a detection limit around 5 nm.

Paper Details

Date Published: 23 October 2001
PDF: 10 pages
Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); doi: 10.1117/12.445605
Show Author Affiliations
Sylvain Petitgrand, Univ. Paris-Sud XI (France)
Reda Yahiaoui, Univ. Paris-Sud XI (France)
Alain Bosseboeuf, Univ. Paris-Sud XI (France)
Kamran Danaie, Univ. Paris-Sud XI (France)

Published in SPIE Proceedings Vol. 4400:
Microsystems Engineering: Metrology and Inspection
Christophe Gorecki; Werner P. O. Jueptner; Malgorzata Kujawinska, Editor(s)

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