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Proceedings Paper

Application of Ritchey-Common test in large flat measurements
Author(s): Sen Han; Erik Novak; Mike Schurig
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Paper Abstract

The Ritchey-Common test is a well-known method for large flat measurements. This paper describes a straightforward implementation ofthe formulas, to allow accurate surface height calculation using relatively few separate measurements. Both Ritchey-Common test and direct measurement results are presented. In comparison of the two methods, the RitcheyCommon test is in good agreement with the direct measurement.

Paper Details

Date Published: 3 October 2001
PDF: 6 pages
Proc. SPIE 4399, Optical Measurement Systems for Industrial Inspection II: Applications in Production Engineering, (3 October 2001);
Show Author Affiliations
Sen Han, Veeco Instruments Inc. (United States)
Erik Novak, Veeco Instruments Inc. (United States)
Mike Schurig, Veeco Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 4399:
Optical Measurement Systems for Industrial Inspection II: Applications in Production Engineering
Roland Hoefling; Werner P. O. Jueptner; Malgorzata Kujawinska, Editor(s)

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