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Proceedings Paper

Electromagnetic optical switch for optical network communication
Author(s): Chengtang Pan; S.C. Shen; His-harng Yang; Min-Chieh Chou; Shinn-Tyan Wu
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Paper Abstract

The electromagnetic optical switch combines with Ni/Fe permalloy magnetic circuit design, high aspect ratio microstructure electroplating, bulk micromachining, excimer laser ablation and low temperature wafer bonding. The result shows it can output force 68 mN, deflection angle can reach 82 degree(s) only with 4820A/m, frequency can reach 2 kHz, and bonding strength can be larger than 216 kg/cm2.

Paper Details

Date Published: 18 October 2001
PDF: 7 pages
Proc. SPIE 4582, Optical Switching and Optical Interconnection, (18 October 2001); doi: 10.1117/12.445100
Show Author Affiliations
Chengtang Pan, Industrial Technology Research Institute (Taiwan)
S.C. Shen, National Tsing Hua Univ. (Taiwan)
His-harng Yang, National Chung Hsing Univ. (Taiwan)
Min-Chieh Chou, Industrial Technology Research Institute and National Tsing Hua Univ. (Taiwan)
Shinn-Tyan Wu, National Tsing Hua University (Taiwan)

Published in SPIE Proceedings Vol. 4582:
Optical Switching and Optical Interconnection
Lih-Yuan Lin; Shulian Zhang, Editor(s)

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