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Proceedings Paper

Integrated MMI optical couplers and optical switches in silicon-on-insulator technology
Author(s): Jinzhong Yu; Hongzhen Wei; Xiaofeng Zhang; Qingfeng Yan; Jinsong Xia
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Paper Abstract

Integrated multimode interference coupler based on silicon-on- insulator has been become a kind of more and more attractive device in optical systems. Thin cladding layers (< 1.0 micrometers ) can be used in SOI waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. Here we demonstrate the design and fabrication of multimode interference (MMI) optical couplers and optical switches in SOI technology.

Paper Details

Date Published: 18 October 2001
PDF: 6 pages
Proc. SPIE 4582, Optical Switching and Optical Interconnection, (18 October 2001); doi: 10.1117/12.445077
Show Author Affiliations
Jinzhong Yu, Institute of Semiconductors (China)
Hongzhen Wei, Institute of Semiconductors (China)
Xiaofeng Zhang, Institute of Semiconductors (China)
Qingfeng Yan, Institute of Semiconductors (China)
Jinsong Xia, Institute of Semiconductors (China)

Published in SPIE Proceedings Vol. 4582:
Optical Switching and Optical Interconnection
Lih-Yuan Lin; Shulian Zhang, Editor(s)

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