System-level simulation, to which is paid much attention because of its multi-discipline, is a special requirement for MEMS analysis and design. In the article, an adaptive modeling methodology based on the evolutionary computation (ECM) is proposed, in accordance with the existed problems in present modeling. The lower order modals and the general independent functions are considered to construct the complete set. The dynamical equations of the reduced order model can be obtained. As an example, a static electrical actuator with micro cantilever is analyzed. The traditional modeling problems such as, how to find a good set of basic shapes, which elements should be selected in the base set, and how to construct the energy expression etc. can be solved by using ECM.

Date Published: 15 October 2001
PDF: 5 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444710

Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices
Norman C. Tien; Qing-An Huang, Editor(s)