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Proceedings Paper

DEM microfabrication technique and its applications in bioscience and microfluidic systems
Author(s): Di Chen; Fan Yang; Min Tang; Yigui Li; Jun Zhu; Dacheng Zhang
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Paper Abstract

A new LIGA-like microfabrication technique was developed by present authors. DEM (deepetching, electroforming and microreplication) is the abbreviation of three main process steps in this new microfabrication technique. In contrast to LIGA technique, DEM technique has the advantages of lower cost and shorter process period. Microfluidic systems like plastic capillary electrophoresis chips, micro flowmeters and three-dimensional DNA chips were developed using DEM technique. DEM technique offers a new way for fabrication of MEMS and MOEMS components.

Paper Details

Date Published: 15 October 2001
PDF: 5 pages
Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); doi: 10.1117/12.444704
Show Author Affiliations
Di Chen, Shanghai Jiao Tong Univ. (China)
Fan Yang, Shanghai Jiao Tong Univ. (China)
Min Tang, Shanghai Jiao Tong Univ. (China)
Yigui Li, Shanghai Jiao Tong Univ. (China)
Jun Zhu, Shanghai Jiao Tong Univ. (China)
Dacheng Zhang, Peking Univ. (China)

Published in SPIE Proceedings Vol. 4601:
Micromachining and Microfabrication Process Technology and Devices
Norman C. Tien; Qing-An Huang, Editor(s)

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