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Proceedings Paper

Using an expert system to interface mainframe computing resources with an interactive video system
Author(s): Raymond Carey; Sheryl F. Wible; Wayne H. Gaynor; Timothy G. Hendry
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Paper Abstract

An expert system called SEIB (sustaining-engineer-in-a-box) has been developed to allow routine lithography troubleshooting to be performed by manufacturing personnel, reducing their dependence on sustaining engineers. SEIB is a multi-media, multi-interface expert system, capable of utilizing interactive video images, PC-based information, and database information contained within a mainframe computer-aided manufacturing (CAM) system. SEIB utilizes a custom expert system contained within a DVIR interactive video platform. This allows for quick resolution of problems without engineering intervention. Because of its design, the system can be easily adapted to any functional area in the fabrication facility.

Paper Details

Date Published: 1 July 1991
PDF: 8 pages
Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); doi: 10.1117/12.44461
Show Author Affiliations
Raymond Carey, Intel Corp. (United States)
Sheryl F. Wible, Intel Corp. (United States)
Wayne H. Gaynor, Intel Corp. (United States)
Timothy G. Hendry, Intel Corp. (United States)

Published in SPIE Proceedings Vol. 1464:
Integrated Circuit Metrology, Inspection, and Process Control V
William H. Arnold, Editor(s)

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