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Proceedings Paper

Advanced confocal technique for submicron CD measurements
Author(s): Axel Rohde; Ralf Saffert; John Fitch
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Paper Abstract

A new CD measuring tool based on confocal scanning technology, Carl Zeiss Axioscan, is described. The advantages of having a great variability in choosing the illumination is demonstrated with several examples. Selection of deep UV illumination increases the lateral and height resolution of the system. Matching the illumination to the optical constants of the materials to be measured enhances the reproducibility and the accuracy of the measurement. In the description of the system, it is shown how the confocal scanning technique can be implemented with conventional light sources, and how this increases the flexibility in illumination conditions.

Paper Details

Date Published: 1 July 1991
PDF: 9 pages
Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); doi: 10.1117/12.44456
Show Author Affiliations
Axel Rohde, Carl Zeiss (Germany)
Ralf Saffert, Carl Zeiss (Germany)
John Fitch, Carl Zeiss, Inc. (United States)

Published in SPIE Proceedings Vol. 1464:
Integrated Circuit Metrology, Inspection, and Process Control V
William H. Arnold, Editor(s)

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