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Proceedings Paper

Cross-sectional imaging in SEM: signal formation mechanism and CD measurements
Author(s): Leon A. Firstein; Arthur Noz
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Paper Abstract

SEM cross-sectional (CS) imaging widely practiced in CD measurements of sub- micron (down to .10 micrometers ) features will be reviewed with emphasis on the accuracy with which these measurements represent the actual dimensions. Since the CS imaging mode is commonly employed to establish a correct CD linescan measuring algorithm, the magnitude of systematic error associated with CS imaging at specific SEM settings will be addressed. The image formation mechanism developed by K.-R. Peters was invoked in the investigation of the electron-scattering signal generated by topographic contrast in CS imaging. The main result of this study--the systematic error in the CS imaging mode, at the same experimental conditions, is larger than that in the normal incidence linescan mode--has been found to markedly contradict the commonly accepted metro logical assumption applied to CS CD measurements. Theoretical and experimental results supporting this conclusion will be presented and discussed.

Paper Details

Date Published: 1 July 1991
PDF: 8 pages
Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); doi: 10.1117/12.44426
Show Author Affiliations
Leon A. Firstein, RFN Technology (United States)
Arthur Noz, RFN Technology (United States)

Published in SPIE Proceedings Vol. 1464:
Integrated Circuit Metrology, Inspection, and Process Control V
William H. Arnold, Editor(s)

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