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Proceedings Paper

High-speed stepper setup using a low-voltage SEM
Author(s): Jozef P. H. Benschop; Kevin M. Monahan; Tom A. Harris
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Paper Abstract

Under low dose conditions, low-voltage SEMs can measure the bottom width of a resist profile accurately over a wide range of resist side wall angles, thus allowing a accurate, precise and fast measurement of focus-exposure matrices. It is also shown that the measured data fits a fixed parameter model well. By means of statistically leveraged experimental design techniques, a robust focus-exposure-response surface may be generated with as few as nine measurements. This approach greatly reduces measurement time, resulting in high-speed stepper setup. Results are shown for different experimental designs and different low- and-high voltage SEMs.

Paper Details

Date Published: 1 July 1991
PDF: 9 pages
Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); doi: 10.1117/12.44424
Show Author Affiliations
Jozef P. H. Benschop, Signetics Co. (United States)
Kevin M. Monahan, Signetics Co. (United States)
Tom A. Harris, Signetics Co. (United States)

Published in SPIE Proceedings Vol. 1464:
Integrated Circuit Metrology, Inspection, and Process Control V
William H. Arnold, Editor(s)

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