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Proceedings Paper

Figure of merit for calibration and comparison of linewidth measurement instruments
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Paper Abstract

A new figure of merit, the critical dimension capability factor, of CDC, is described. The CDC incorporates measurements taken over a range of linewidths and over a range of process variations which simulate normal and extreme process operating conditions. Under these conditions CDC uniquely quantifies the capability of the measurement instrument on a given substrate and for a given set of parameter settings. CDC is calculated by performing a linear regression between measurements generated by the instrument under test (IUT) and a set of reference values (internally generated standard values). The mean square error (MSE) between the regression line and the observed values is then partitioned into components which estimate the contribution to the MSE from various sources based on a rigorous statistical analysis. The final CDC value is defined as the linewidth to uncertainty ratio and is a function of uncertainty introduced in the characterization procedure as well as the uncertainty introduced when the IUT makes a measurement in practice. Since the CDC is a function of the overall uncertainty in the measurements of the IUT relative to the reference values, it can legitimately be compared from one instrument to another and used to evaluate alternative measurement methods and technologies.

Paper Details

Date Published: 1 July 1991
PDF: 13 pages
Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); doi: 10.1117/12.44421
Show Author Affiliations
Robert R. Hershey, Motorola, Inc. (United States)
Terrence E. Zavecz, TEA Systems Corp. (United States)

Published in SPIE Proceedings Vol. 1464:
Integrated Circuit Metrology, Inspection, and Process Control V
William H. Arnold, Editor(s)

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