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Proceedings Paper

Optically transparent gripper for microassembly
Author(s): Eniko T. Enikov; Kalin V. Lazarov
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Paper Abstract

Production of complex Micro-Opto Electro-Mechanical Systems (MOEMS) often requires assembly of a system from individual components built by mutually incompatible processes. This fabrication step also constitutes the largest portion of the total cost (about 80%), and is one of the major roadblocks to successfully implementing a complex microsystem. Our previous experience with such systems shows, that gripping and manipulation of microparts significantly differs from the assembly of macroscopic devices. The main difference stems from the increased role of the surface electrostatic forces and the reduced influence of body forces such as gravity. This paper describes one possible use of the surface forces in the development of a novel optically transparent electrostatic microgripper. The principle of operation, design and simulation of the new device are described. Several models describing the gripping force are also presented. The out-of-plane and in-plane holding (frictional) forces are measured as a function of the applied voltage for two common materials - silicon and nickel. The fabrication sequence and the materials used are discussed.

Paper Details

Date Published: 8 October 2001
PDF: 10 pages
Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); doi: 10.1117/12.444143
Show Author Affiliations
Eniko T. Enikov, Univ. of Arizona (United States)
Kalin V. Lazarov, Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 4568:
Microrobotics and Microassembly III
Bradley J. Nelson; Jean-Marc Breguet, Editor(s)

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