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Proceedings Paper

Development of optical MEMS carbon dioxide sensors
Author(s): Nicholas Moelders; Mark P. McNeal; Martin U. Pralle; Lisa Last; William Ho; Anton C. Greenwald; James T. Daly; Edward A. Johnson; Thomas George; Daniel S. Choi
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Paper Abstract

A NDIR-based sensor-chip using MEMS Si micro-bridge elements, with integrated PBG structure for wavelength tuning is discussed. The effects of processing on device performance, especially device release, were investigated. Thermal and electrical device characterization was used to quantify loss mechanisms. Thermally isolated, uniformly heated emitters were ultimately achieved using a backside release etch fabrication process. The fully released devices demonstrated superior electric to thermal (optical) conversion, with the requisite narrow band emission for CO2 detection. Using the MEMS sensor-chips, 20% CO2 detection was demonstrated, with projected sensitivities of ~3% CO2.

Paper Details

Date Published: 2 October 2001
PDF: 10 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443100
Show Author Affiliations
Nicholas Moelders, Ion Optics, Inc. (United States)
Mark P. McNeal, Ion Optics, Inc. (United States)
Martin U. Pralle, Ion Optics, Inc. (United States)
Lisa Last, Ion Optics, Inc. (United States)
William Ho, Ion Optics, Inc. (United States)
Anton C. Greenwald, Ion Optics, Inc. (United States)
James T. Daly, Ion Optics, Inc. (United States)
Edward A. Johnson, Ion Optics, Inc. (United States)
Thomas George, Jet Propulsion Lab. (United States)
Daniel S. Choi, Jet Propulsion Lab. (United States)

Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

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