Share Email Print

Proceedings Paper

High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS
Author(s): James G. Fleming; Seethambal S. Mani; Shawn-Yu Lin
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

An overview is given of the integration of 1,2 and 3D photonic lattice structures with surface MEMS (MicroElectroMechanical Systems). The properties of the photonic lattice arise as a result of a high index contrast between two or more media arranged in an appropriate fashion. Increased photonic lattice functionality is obtained as the arrangement of high and low index materials is extended into other dimensions. Potential photonic lattice functions which can be integrated with surface MEMS include mirrors, cavities and wavelength dependent switches in 1D, waveguides and prisms in 2D and 3D waveguides, prisms, polarization, dispersion, thermal and spontaneous emission control in 3D.

Paper Details

Date Published: 2 October 2001
PDF: 6 pages
Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443085
Show Author Affiliations
James G. Fleming, Sandia National Labs. (United States)
Seethambal S. Mani, Sandia National Labs. (United States)
Shawn-Yu Lin, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 4561:
MOEMS and Miniaturized Systems II
M. Edward Motamedi; Rolf Goering, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?