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Proceedings Paper

Dynamic modeling and optimization of a valveless PZT micropump
Author(s): Shifeng Li; Yang Liu; Shaochen Chen
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Paper Abstract

A dynamic model for a PZT actuated valveless micropump is presented in this work. The model couples PZT actuation with fluid flow in a flow chamber. Extended Bernoulli equation is used to describe flow dynamics in the inlet and outlet of the micropump. The dependence of the output pressure and flow rate on pump parameters is discussed. For low frequency actuation, the flow rate and back pressure increase as the PZT membrane thickness increases. The flow rate also increases for larger nozzle neck. The back pressure increases as the nozzle neck enlarges, reaches a maximum at about 80 microns, and then decreases when the nozzle neck keeps increasing. Such dependence becomes insignificant for nozzle neck larger than 200 microns. This model also predicts that the neck length has little influence on the back pressure and flow rate.

Paper Details

Date Published: 28 September 2001
PDF: 8 pages
Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); doi: 10.1117/12.443072
Show Author Affiliations
Shifeng Li, Iowa State Univ. (United States)
Yang Liu, Iowa State Univ. (United States)
Shaochen Chen, Iowa State Univ. (United States)

Published in SPIE Proceedings Vol. 4560:
Microfluidics and BioMEMS
Carlos H. Mastrangelo; Holger Becker, Editor(s)

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