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Proceedings Paper

Reliability of micro-electro-mechanical systems (MEMS)
Author(s): Srinivas Tadigadapa; Nader Najafi
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Paper Abstract

Reliability is a key parameter for the eventual prevalence of microelectromechanical systems (MEMS) as either sub-components or as standalone products. Traditionally, micromachined components have been made by separating the micromachined chip design and fabrication processes from the packaging and reliability issues.

Paper Details

Date Published: 2 October 2001
PDF: 9 pages
Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.443002
Show Author Affiliations
Srinivas Tadigadapa, The Pennsylvania State Univ. (United States)
Nader Najafi, Integrated Sensing Systems Inc. (United States)

Published in SPIE Proceedings Vol. 4558:
Reliability, Testing, and Characterization of MEMS/MOEMS
Rajeshuni Ramesham, Editor(s)

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