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Proceedings Paper

Thinned backside-illuminated cooled CCDs for UV and VUV applications
Author(s): Ilia Nikolaevic Dalinenko; G. A. Kuz'min; Alexandre Victorovic Malyarov; Alexander M. Prokhorov; Mikhail Ya. Schelev
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Paper Abstract

It is well known that thinned backside-illuminated CCD image sensors are very efficient for electron beam imaging. The authors have adapted an electron-bombarded (EB) CCD for application in UV and VUV spectral regions. This adaptation includes the creation of a shallow accumulation layer near the device backside surface either by ion implantation and annealing or by a certain chemical treatment of the surface. Preliminary experimental results confirm the applicability of the developed procedure in achieving a reasonable quantum efficiency. Some problems associated with the UV and VUV imagers design and fabrication are discussed.

Paper Details

Date Published: 1 June 1991
PDF: 6 pages
Proc. SPIE 1449, Electron Image Tubes and Image Intensifiers II, (1 June 1991); doi: 10.1117/12.44276
Show Author Affiliations
Ilia Nikolaevic Dalinenko, All-Union Research Institute Electron (Russia)
G. A. Kuz'min, All-Union Research Institute Electron (Russia)
Alexandre Victorovic Malyarov, All-Union Research Institute Electron (Russia)
Alexander M. Prokhorov, General Physics Institute (Russia)
Mikhail Ya. Schelev, General Physics Institute (Russia)

Published in SPIE Proceedings Vol. 1449:
Electron Image Tubes and Image Intensifiers II
Illes P. Csorba, Editor(s)

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