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Proceedings Paper

Lithographic behavior of carboxylate-based dissolution inhibitors and the effect of blending
Author(s): Francis M. Houlihan; Zhenglin Yan; Elsa Reichmanis; Gary Dabbagh; Kevin J. Bolan; Omkaram Nalamasu; Ilya L. Rushkin; Ognian N. Dimov
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Paper Abstract

We report on a lithographic study of the behavior of non- cholate tert-butylcarboxylate dissolution inhibitor (DI's) formulated in a poly(norbornene/maleic anhydride/acrylic acid/tert-butyl acrylate) 193 nm single layer resin. A comparision is made between formulations containing non- cholate DI's, cholate based DI's and formulations containing blends of the two different types of DI's. It was found that formulations containing the non-cholate materials tended to give T-topped profiles while the formulations containing cholate based materials and blends containing as little as 1% cholate based DI did not.

Paper Details

Date Published: 24 August 2001
PDF: 9 pages
Proc. SPIE 4345, Advances in Resist Technology and Processing XVIII, (24 August 2001); doi: 10.1117/12.436904
Show Author Affiliations
Francis M. Houlihan, Agere Systems (United States)
Zhenglin Yan, Agere Systems (United States)
Elsa Reichmanis, Lucent Technologies/Bell Labs. (United States)
Gary Dabbagh, Agere Systems (United States)
Kevin J. Bolan, Lucent Technologies/Bell Labs. (United States)
Omkaram Nalamasu, Agere Systems (United States)
Ilya L. Rushkin, Arch Chemicals, Inc. (United States)
Ognian N. Dimov, Arch Chemicals, Inc. (United States)

Published in SPIE Proceedings Vol. 4345:
Advances in Resist Technology and Processing XVIII
Francis M. Houlihan, Editor(s)

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