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Proceedings Paper

Theoretical calculations of photoabsorption of several alicyclic molecules in the vacuum ultraviolet region
Author(s): Nobuyuki N. Matsuzawa; Akihiko Ishitani; David A. Dixon; Tsuyoshi Uda
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Paper Abstract

In order to aid in the design of transparent materials for use as photoresists for F2 lithography (157nm), we have performed time-dependent density functional theory (TD-DFT) calculations of the photoabsorption of molecules in the vacuum ultraviolet region. The application of this TD-DFT method to the prediction of photoabsorption was benchmarked using model molecules such as formaldehyde, and an empirical equation for correcting the calculated transition energy was obtained. The TD-DFT method with the empirical correction equation provides dramatically more accurate results than those obtained with the CIS (single-excitation configuration interaction) method, which we employed in previous studies. We used it to predict the photoabsorption of various molecules such as methanol, t-butylalcohol, acetic acid, methyl acetate, cycloalkane, norbonane, tricylodecane, tetrahydropyrane, admantane, maleic anhydride and their fluorinated derivatives.

Paper Details

Date Published: 24 August 2001
PDF: 10 pages
Proc. SPIE 4345, Advances in Resist Technology and Processing XVIII, (24 August 2001); doi: 10.1117/12.436871
Show Author Affiliations
Nobuyuki N. Matsuzawa, Association of Super-Advanced Electronics Technologies (Japan)
Akihiko Ishitani, Association of Super-advanced Electronics Technolo (Japan)
David A. Dixon, Pacific Northwest National Lab. (United States)
Tsuyoshi Uda, National Institute for Advanced Interdisciplinary Research (Japan)

Published in SPIE Proceedings Vol. 4345:
Advances in Resist Technology and Processing XVIII
Francis M. Houlihan, Editor(s)

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