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Proceedings Paper

Experimental VUV absorbance study of fluorine-functionalized polystyrenes
Author(s): Roderick R. Kunz; Roger F. Sinta; Michael Sworin; William A. Mowers; Theodore H. Fedynyshyn; Vladimir Liberman; Jane E. Curtin
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Paper Abstract

A number of fluoro-functionalized poly(4-hydroxystyrene) derivatives, consisting of both blocked and unblocked hexafluoroisopropanol-substituted stryrenes, were prepared and their vacuum-ultraviolet absorption spectra were measured. From our efforts, we find that a wide range of synthetic flexibility exists and allows for a variety of fluorinated analogs of APEX-like and ESCAP-like copolymers and terpolymers with 157nm absorption coefficients less than 4.0micrometers . From these findings, we conclude that facile routes to high-performance 157nm resins are possible with optimum imaging thicknesses of 100 to 130nm.

Paper Details

Date Published: 24 August 2001
PDF: 11 pages
Proc. SPIE 4345, Advances in Resist Technology and Processing XVIII, (24 August 2001); doi: 10.1117/12.436858
Show Author Affiliations
Roderick R. Kunz, MIT Lincoln Lab. (United States)
Roger F. Sinta, MIT Lincoln Lab. (United States)
Michael Sworin, MIT Lincoln Lab. (United States)
William A. Mowers, MIT Lincoln Lab (United States)
Theodore H. Fedynyshyn, MIT Lincoln Lab. (United States)
Vladimir Liberman, MIT Lincoln Lab. (United States)
Jane E. Curtin, MIT Lincoln Lab. (United States)

Published in SPIE Proceedings Vol. 4345:
Advances in Resist Technology and Processing XVIII
Francis M. Houlihan, Editor(s)

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