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Proceedings Paper

Smart-power integrated circuits to drive piezoelectric actuators for a cm3 microrobot system
Author(s): Manel Puig-Vidal; J. Lopez-Sanchez; P. Miribel-Catala; Enric Montane; Sebastian A. Bota; Josep Samitier; Urban Simu; Stefan A. I. Johansson
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Paper Abstract

Today, the use of robots for self acting tasks in applications ranging from biology and medicine to microsystems technology demand miniaturized dimensions and high-precision handling techniques. A lot of these tasks have been carried out by humans, but the manual capabilities are restricted to certain tolerances. Transport and manipulation of biological cells or assembly of micromechanical parts are the best suited applications for microrobots with sizes about cm3. Low cost and high-resolution actuators are critical performances which determine to choose piezoceramic materials as more suitable for micropositioning and micromanipulation units of a cm3 microrobot. Smart Piezoactuator Unit (SPUs) as a basic element of a new generation of cm3 microrobots have been developped. The main characteristic of this proposed Smart Piezoactuator Unit system is the integration of driving circuitry with the piezoelectric actuators and to include a serial communication interface to minimize the number of power and command wires. Micropositioning and micromanipulation units are developed combining properly 6 Smart Piezoactuator Units each one. A BCD technology (Bipolar, CMOS, DMOS) is used to design high voltage smart power integrated circuit for these Smart Piezoactuator Units. Using this technology we integrate in the same chip 4 power drivers with its control and protection circuitry.

Paper Details

Date Published: 16 August 2001
PDF: 11 pages
Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); doi: 10.1117/12.436628
Show Author Affiliations
Manel Puig-Vidal, Univ. de Barcelona (Spain)
J. Lopez-Sanchez, Univ. de Barcelona (Spain)
P. Miribel-Catala, Univ. de Barcelona (Spain)
Enric Montane, Univ. de Barcelona (Spain)
Sebastian A. Bota, Univ. de Barcelona (Spain)
Josep Samitier, Univ. de Barcelona (Spain)
Urban Simu, Uppsala Univ. (Sweden)
Stefan A. I. Johansson, Uppsala Univ. (Sweden)

Published in SPIE Proceedings Vol. 4334:
Smart Structures and Materials 2001: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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