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Proceedings Paper

Development of active PBG structures for realizing novel MOEMS based on transparent metals
Author(s): Salvatore Baglio; Mark J. Bloemer; Nicolo Savalli; Michael Scalora
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Paper Abstract

This work deals with the development of a novel class of smart opto-electro-mechanical devices that are based on Photonic Band Gap materials consisting of several periods of suitable metal-dielectric couples. Innovative devices with electrically controllable optical properties are obtained that can be used both as sensors with optical output signals for application in hostile environments and as controlled optical filters. Theoretical models of such novel devices together with experimental prototypes have been developed and characterization of the devices has been performed. Finally an integrated device, realized by using standard CMOS technologies and compatible micromachining processes, in being developed.

Paper Details

Date Published: 16 August 2001
PDF: 11 pages
Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); doi: 10.1117/12.436616
Show Author Affiliations
Salvatore Baglio, Univ. of Catania (Italy)
Mark J. Bloemer, U.S. Army Aviation and Missile Command (United States)
Nicolo Savalli, Univ. of Catania (Italy)
Michael Scalora, U.S. Army Aviation and Missile Command (United States)

Published in SPIE Proceedings Vol. 4334:
Smart Structures and Materials 2001: Smart Electronics and MEMS
Vijay K. Varadan, Editor(s)

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