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Proceedings Paper

Output power stabilization of a XeCl excimer laser by HCl gas injection
Author(s): Satoshi Ogura; Yukio Kawakubo; Kouji Sasaki; Yoshiyuki Kubota; Atsushi Miki
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Paper Abstract

A laser output power control system which has an ability to realize high stability of the laser output power in long-term operation is proposed for high-power rare-gas halide excimer lasers. The system has a function of maintaining laser gas conditions, mainly the halogen gas concentration, constant against the gas degradation in the laser tube. As a result the laser output power is stabilized at near maximum available power. The system has been applied to a 20-W UV-preionozed XeCl excimer laser and the laser output power has been stabilized for 8 hours successfully with a fluctuation less than +/- 2% at 20 W.

Paper Details

Date Published: 1 May 1991
PDF: 6 pages
Proc. SPIE 1412, Gas and Metal Vapor Lasers and Applications, (1 May 1991); doi: 10.1117/12.43641
Show Author Affiliations
Satoshi Ogura, Hitachi Research Lab. (Japan)
Yukio Kawakubo, Hitachi Research Lab. (Japan)
Kouji Sasaki, Hitachi Research Lab. (Japan)
Yoshiyuki Kubota, Hitachi Research Lab. (Japan)
Atsushi Miki, Hitachi Research Lab. (Japan)

Published in SPIE Proceedings Vol. 1412:
Gas and Metal Vapor Lasers and Applications
Jin J. Kim; Frank K. Tittel, Editor(s)

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