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Proceedings Paper

Comparison of ellipsometric methods for separate determination of thickness and optical constants of thin films
Author(s): Eugene G. Bortchagovsky; O. M. Getsko
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Paper Abstract

This talk is devoted to the analysis of different ellipsometric methods for their ability to get separately thickness and refractive index of thin films. Such analysis is necessary for unambiguous determination of all thin film parameters, not only its 'optical thickness.' Analysis and comparison of different approaches for solving of this problem is made both on the base of the theoretical consideration of methods background and on the calculation of correlation matrix for parameters of interest.

Paper Details

Date Published: 10 August 2001
PDF: 8 pages
Proc. SPIE 4517, Lightmetry: Metrology, Spectroscopy, and Testing Techniques Using Light, (10 August 2001); doi: 10.1117/12.435962
Show Author Affiliations
Eugene G. Bortchagovsky, Institute of Semiconductor Physics (Ukraine)
O. M. Getsko, Institute of Semiconductor Physics (Ukraine)

Published in SPIE Proceedings Vol. 4517:
Lightmetry: Metrology, Spectroscopy, and Testing Techniques Using Light
Maksymilian Pluta, Editor(s)

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