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Proceedings Paper

Technological aspects of potentiometric BSC-type microsensor fabrication
Author(s): Dorota Pijanowska; Katarzyna Wygladacz; Jerzy Jazwinski; Jan M. Lysko; Jan Koszur; Zbigniew Brzozka; Elzbieta Malinowska
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Paper Abstract

The reported back-side contact sensor were fabricated using a standard IC technology. The silver/silver chloride layers were deposited using electrochemical technique. The sensor chips were passivated with silicon nitride layer deposited by LPCVD, which ensure the stability of measurements. Preliminary examination of prepared sensor included the evaluation of their electrical properties and potentiometric response toward chloride. It was found that 19 sensors among 20 exhibited fast and reversible response toward chloride. Near theoretical slopes were obtained over the 10-4- 10-1 M chloride concentration range. The response time was shorter than 10S. The statistical evaluation, the calibration curves and the dynamic response of 20 sensors tested at the same time indicates that the proposed technology ensures preparation of sensor chips in a very reproducible way.

Paper Details

Date Published: 8 August 2001
PDF: 4 pages
Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); doi: 10.1117/12.435944
Show Author Affiliations
Dorota Pijanowska, Institute of Electron Technology (Poland)
Katarzyna Wygladacz, Warsaw Univ. of Technology (Poland)
Jerzy Jazwinski, Institute of Electron Technology (Poland)
Jan M. Lysko, Institute of Electron Technology (Poland)
Jan Koszur, Institute of Electron Technology (Poland)
Zbigniew Brzozka, Warsaw Univ. of Technology (Poland)
Elzbieta Malinowska, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 4516:
Optoelectronic and Electronic Sensors IV
Jerzy Fraczek, Editor(s)

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