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Proceedings Paper

Temperature distribution model for the semiconductor dew point detector
Author(s): Jerzy Weremczuk; Z. Gniazdowski; Ryszard Jachowicz; Jan M. Lysko
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Paper Abstract

The simulation results of temperature distribution in the new type silicon dew point detector are presented in this paper. Calculations were done with use of the SMACEF simulation program. Fabricated structures, apart from the impedance detector used to the dew point detection, contained the resistive four terminal thermometer and two heaters. Two detector structures, the first one located on the silicon membrane and the second one placed on the bulk materials were compared in this paper.

Paper Details

Date Published: 8 August 2001
PDF: 7 pages
Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); doi: 10.1117/12.435919
Show Author Affiliations
Jerzy Weremczuk, Warsaw Univ. of Technology (Poland)
Z. Gniazdowski, Institute of Electron Technology (Poland)
Ryszard Jachowicz, Warsaw Univ. of Technology (Poland)
Jan M. Lysko, Institute of Electron Technology (Poland)

Published in SPIE Proceedings Vol. 4516:
Optoelectronic and Electronic Sensors IV
Jerzy Fraczek, Editor(s)

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