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Proceedings Paper

Pulsed laser deposition of thin films for optics applications
Author(s): M. L. De Giorgi; M. Fernandez; Gilberto Leggieri; Armando Luches; Maurizio Martino; A. Zocco
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Paper Abstract

SiO2 and ITO (indium tin oxide) were deposited by ablating Si, SiO and ITO targets, respectively, in low- pressure oxygen atmosphere with pulsed XeCl and KrF excimer laser. The SiO2 and ITO films were deposited on Si<100> and glass (BK7) substrates at temperatures of 20-600 degree(s)C. The substrates were generally set parallel to the target. To reduce droplet deposition in SiO2 films, the off-axis configuration or the so-called eclipse method, characterized by a shadow mask between target and substrate were used. Dense, continuous ITO films with resistivity as low as 1.6x10-4/ (Omega cm and a high transparency (80-90%) in the visible and near-infrared regions were deposited. Ultra-thin (approximately 6 nm) films were deposited and successfully used as electrodes in optoelectronic devices. Dense, stoichiometric, thick (>2 micrometers ) SiO2 films were deposited on substrates either at room temperature or heated at moderate temperatures (100- 600 degree(s)C). Droplet density and surface roughness strongly depend on ablation configuration. Roughness can be kept quite low (approximately 5 nm) by using the KrF laser and a quite large target-to-substrate distance (8-12 cm). It is shown that multi-component films like ITO and Silica (SiO2) can be efficiently deposited by using the reactive pulsed laser deposition technique.

Paper Details

Date Published: 29 June 2001
PDF: 10 pages
Proc. SPIE 4430, ROMOPTO 2000: Sixth Conference on Optics, (29 June 2001); doi: 10.1117/12.432840
Show Author Affiliations
M. L. De Giorgi, INFM and Univ. degli Studi di Lecce (Italy)
M. Fernandez, INFM and Univ. degli Studi di Lecce (Italy)
Gilberto Leggieri, INFM and Univ. degli Studi di Lecce (Italy)
Armando Luches, INFM and Univ. degli Studi di Lecce (Italy)
Maurizio Martino, INFM and Univ. degli Studi di Lecce (Italy)
A. Zocco, INFM and Univ. degli Studi di Lecce (Italy)

Published in SPIE Proceedings Vol. 4430:
ROMOPTO 2000: Sixth Conference on Optics
Valentin I. Vlad, Editor(s)

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